OPTICAL PROFILOMETER
Product make : KLA Tenco
Company Name : KLA Tenco
Model : Zeta 20
v Step height: 3D step height from nm to mm
v Texture: 3D roughness and waviness
v Form: 3D bow and shape
v Stress: 2D thin film stress
v Film thickness: film thickness from 30nm to 100µm
v Defect inspection: capture defects greater than 1µm